NUMERICAL SIMULATION AND EXPERIMENTAL STUDY OF THE TEMPERATURE UNDER THE SEMICONDUCTOR LASER ANNEALING

Ref.No: 65162300
Start date: 05.11.2007
End date: 04.02.2010
Approval date: 12.10.2007
Department: APPLIED MATHEMATICAL & PHYSICAL SCIENCES
Sector: PHYSICS
Financier: ΒΑΣΙΚΗ ΕΡΕΥΝΑ, EIDIKOS LOG/MOS EMP
Budget: 15.000,00 €
Scientific Responsible: Prof. ZERGIOTI
Email: zergioti@central.ntua.gr
Description: THE AIM OF THE PROJECT IS THE STUDY OF THE NANOSECOND AND FEMTOSECOND LASER INTERACTION WITH SEMICONDUCTORS. THE THERMAL BEHAVIOR OF SIC AND SI UNDER NANOSECOND AND FEMTOSECOND PULSED LASER ANNEALING WILL BE STUDIED BOTH EXPERIMENTALLY AND THEORETICALLY
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