| Ref.No: | 68064000 |
| Start date: | 08.11.2003 |
| End date: | 31.12.2007 |
| Approval date: | 02.07.2004 |
| Department: | CHEMICAL ENGINEERING |
| Sector: | PROCESS ANALYSIS AND PLANT DESIGN |
| Financier: | ΕΠΕΑΕΚ II, U.P.E.P.TH |
| Budget: | 33.831,00 € |
| Scientific Responsible: | Prof. BOUDOUVIS |
| Email: | boudouvi@chemeng.ntua.gr |
| Description: | A NEW METHOD IS PROPOSED FOR MAKING MICRO-FLUIDICS DEVICES, THROUGH POLYMER ETCHING WITH GASEOUS PLASMA. THE SHAPE OF THE ETCHED STRUCTURE IS DETERMINED BY MEANS OF AN APPROPRIATE MASK IN A PHOTOLITHOGRAPHIC PROCEDURE |
